Fabrication of glassy carbon microstructures by soft lithography
نویسندگان
چکیده
Ž This paper describes fabrication techniques for the fabrication of glassy carbon microstructures. Molding of a resin of poly furfuryl . alcohol using elastomeric molds yields polymeric microstructures, which are converted to free-standing glassy carbon microstructures by Ž . Ž 2. heating T ;500–11008C under argon. This approach allows the preparation of macroscopic structures several mm with microscopic Ž . features ;2 mm . Deformation of the molds during molding of the resin allows preparation of curved microstructures. The paper also presents a method of incorporating these structures on a chip by masking and electroplating. q 1999 Elsevier Science S.A. All rights
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